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⬜ DC Ion Source

2 Grid Optic

DC Ion Source

Specification

  • Kaufman Type Ion Source
  • Beam Aperture : Ø40 ~ Ø60 mm
  • Beam Energy : ~ 2,000 eV
  • Gas : Inert Gas
  • Gas Flow : 10~30 sccm
  • Mount Flange : ISO160 

Configuration