⬜ CVD System
Plasma Enhanced
CVD System
Specification
- DLC Mass Production PECVD System
- Electrical Power : RF 13.56MHz
- Gas Shower Head Type
- Coating Area : Ø700mm
- Uniformity : ≤10% @ Ø600mm
- Gas : Ar, N2, SiH4, CH4, C2H2 etc
- a-C:H DLC, SiO2, SiN2 etc
Configuration
