⬜ Anode Ion Source
Easy Maintenance
Anode Ion Source
Specification
- Source Type : High Flux Anode Ion Source
- Beam Aperture : Ø50 mm
- Beam Energy : ~ 2,000 eV
- Gas : Inert & Reactive Gas
- Gas Flow : 10~30 sccm
- Mount Flange : ISO160 or Clamp Type
Configuration
