⬜ PVD System
Hybrid
PVD System
Specification
- Coating Area : Ø300mm with 8Axis Planetary
- Sputter Source : 2set of 3inch Metal Coating
- Sputtering Ion Source : Ø60 Kaufman Source
- Reactive Ion Source : Ø60 Anode Source
- Uniformity : ≤10% @ Ø600mm
- Possible to Metal & DLC Deposition
- Mass Production for DLC Deposition
Configuration
